Ville Kaajakari
Kaajakari Ville:
Practical Mems
Analysis And Design Of Microsystems, Mems Sensors (Accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, Rf Mems, Optical Mems, And Microfluidic Systems
Small Gear Publishing (United States), 2009
Hardback, 496 pages

