Banqiu Wu, Ph.D., Is Chief Technology Officer, Mask Products Division, Applied Materials, Inc. Ajay Kumar, Ph.D., (Santa Clara, Ca) Is General Manager, Cleans And Mask Products Business Group, Applied Materials, Inc.
Editor: Banqiu Wu, Editor: Ajay Kumar
Wiley-Vch Verlag Gmbh , 2009
Hardcover, 650 pages
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