Franz Gerhard:
Low Pressure Plasmas And Microstructuring Technology

Springer-Verlag Berlin And Heidelberg Gmbh & Co. Kg (Germany), 2008
Hardback, 760 pages
Size: 234x156 mm
ISBN: 9783540858485
ISBN-10: 3540858482

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Low Pressure Plasmas And Microstructuring Technology

A monograph that presents a perspective of gas discharge physics and its applications to various industries. It presents an overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams.

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Gerhard Franz
Atomic & molecular physics
Physics
Mathematics and science
Springer-Verlag Berlin And Heidelberg Gmbh & Co. Kg

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Gerhard Franz
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