Ion Implantation Technology
Editor: Edmund G.Seebauer
American Institute Of Physics (United States), 2009
Hardback, 576 pages
Size: 279x216 mm
ISBN: 9780735405974
ISBN-10: 0735405972
List price: £206.50
You save: 15%
Ion Implantation Technology
Covers the conference that is focused on the advances and technologies in semiconductor processing before, during and after ion implantation. This title includes content that encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design.
