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Ion Implantation Technology

Editor: Edmund G.Seebauer

American Institute Of Physics (United States), 2009
Hardback, 576 pages
Size: 279x216 mm
ISBN: 9780735405974
ISBN-10: 0735405972

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Ion Implantation Technology

Covers the conference that is focused on the advances and technologies in semiconductor processing before, during and after ion implantation. This title includes content that encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design.

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Edmund G. Seebauer
Applied physics & special topics
Physics
Mathematics and science
American Institute Of Physics

More information from Wikipedia:

Edmund G. Seebauer
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