Varadan Vijay K., Jiang Xiaoning, Varadan Vasundara V.:
Microstereolithography

And Other Fabrication Techniques For 3D Mems

John Wiley And Sons Ltd (United Kingdom), 2001
Hardback, 274 pages
Size: 225x172 mm
ISBN: 9780471521853
ISBN-10: 047152185X

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Microstereolithography

Focusing on microstereolithography and other microfabrication for 3D MEMS, this volume discusses the principles of microstereolithography for fabrication of 3D MEMS devices. It provides an account of the developments in related microfabrication and combined architecture techniques, illustrating their application in the engineering field.

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Vijay K. Varadan
Xiaoning Jiang
Vasundara V. Varadan
Electronic devices & materials
Electronics engineering
Electronics & communications engineering
Technology, engineering, agriculture, veterinary science
John Wiley And Sons Ltd

More information from Wikipedia:

Vijay K. Varadan
Xiaoning Jiang
Vasundara V. Varadan
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