Wu Banqiu, Kumar Ajay Kumar:
Extreme Ultraviolet Lithography

Mcgraw-Hill Education - Europe (United States), 2009
Hardback, 482 pages
Size: 238x162 mm
ISBN: 9780071549189
ISBN-10: 0071549188

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Extreme Ultraviolet Lithography

Offers the guidance to extreme ultraviolet lithography (EUVL), covering the scientific theory, processing methods, applications, and directions. Designed to help you optimize EUVL, this resource covers EUV lithography tools, EUV printer, EUV sources, multilayer EUV, EUV optics, as well as defect control, resist, and mask techniques.

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Banqiu Wu
Ajay Kumar Kumar
Circuits & components
Electronics engineering
Electronics & communications engineering
Technology, engineering, agriculture, veterinary science
Mcgraw-Hill Education - Europe

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Banqiu Wu
Ajay Kumar Kumar
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