Wu Banqiu, Kumar Ajay Kumar:
Extreme Ultraviolet Lithography
Mcgraw-Hill Education - Europe (United States), 2009
Hardback, 482 pages
Size: 238x162 mm
ISBN: 9780071549189
ISBN-10: 0071549188
List price: £89.99
You save: 15%
Extreme Ultraviolet Lithography
Offers the guidance to extreme ultraviolet lithography (EUVL), covering the scientific theory, processing methods, applications, and directions. Designed to help you optimize EUVL, this resource covers EUV lithography tools, EUV printer, EUV sources, multilayer EUV, EUV optics, as well as defect control, resist, and mask techniques.

